3 Zone Thermal CVD System

●1.Heating zone temperature
             zone 1: max 1000℃
             zone 2: max 800℃
             zone 3: max 300~400℃

●2.Working pressure
             0.5Torr~5Torr (experimental condition)

●3.Base pressure
             ~10mTorr

●4.Flow rate
             -max 500sccm

●5.Material
             zone 1: PbI2, SnI2, PbBr2, SnBr2, PbCl2, SnCl2……
             zone 2: MAI, MABr, MACl, CsI, CsBr, CsCl……
             zone 3: Substrate

Furance(Horizontal Type)

● Chamber(Quartz) : ø200 X 900
● The Digital Temperature Controller (PID) takes Care for high accuracy of temperature
● High Temperature application with ceramic mold heater Elements
● GAS : Ar, O2, N2
● Application : Diffusion/Annealing

Rapid Thermal Annealing System

● Chamber(Quartz) : ø40 X 400
● heater : Halogen Lamp(Max. 1000°C)
● Heating Zone : 150mm
● GAS : Ar, O2, N2
● Application : Diffusion/Annealing

결성 성장 장치

Sample Rotation 및 인상 module
회전 0~5RPM(Control Panel 회전속도 표시, 제어 : Motor Control
인상 - 저속 0.225~22.5mm/H
         - 고속 0~200mm/min
페르브스카이트용(BTO,LNO,성장용) 인상 프로브 Czochraski 인상방식